Master Equipment Matrix

Draft v3

Fab 4 Expansion — 45 items across 7 systems · 13 discipline groups

Equipment

Connected Load

5.8 MW

Total FLA

5,581

Submittals Approved

25/45

Overdue

45 of 45 rows

Identity(11)

Site

Phase

System

Equip Type

Tag ID

Vendor Tag ID

Equipment Name

Location

Skid

Parent Skid Tag

Status

EUV Lithography(6)

FAB4

Construction

EUV Lithography

Scanner

LIT-3-001

NXE3800E-SN4821

ASML NXE:3800E EUV Scanner

L3-BAY3

—

Active

FAB4

Construction

EUV Lithography

Laser Source

LIT-3-001A

CYMER-SRC-4821A

Cymer LPP EUV Light Source

L3-BAY3

LIT-3-001

Active

FAB4

Construction

EUV Lithography

Reticle Handler

LIT-3-001B

—

ASML Reticle Handler Module

L3-BAY3

LIT-3-001

Active

FAB4

Construction

EUV Lithography

Vacuum Pump

LIT-3-001C

—

Edwards iXH Vacuum Pump Set

L1-SUB-BAY3

LIT-3-001

Active

FAB4

Construction

EUV Lithography

Scanner

LIT-3-002

NXT2050i-SN7712

ASML TWINSCAN NXT:2050i DUV

L3-BAY3

—

Active

FAB4

Construction

EUV Lithography

Coater/Developer

LIT-3-003

—

TEL CLEAN TRACK LITHIUS Pro+

L3-BAY3

—

Active

CMP(5)

FAB4

Construction

CMP

Polisher

CMP-3-001

FREX300S-1201

Ebara FREX 300S CMP Polisher #1

L3-BAY1

—

Active

FAB4

Construction

CMP

Slurry System

CMP-3-001A

—

Entegris Slurry Blend/Delivery

L3-BAY1

CMP-3-001

Active

FAB4

Construction

CMP

Polisher

CMP-3-002

FREX300S-1202

Ebara FREX 300S CMP Polisher #2

L3-BAY1

—

Active

FAB4

Construction

CMP

Cleaner

CMP-3-003

SU3200-0887

DNS SU-3200 Post-CMP Cleaner

L3-BAY1

—

Active

FAB4

Commissioning

CMP

Metrology

MET-3-001

—

KLA Surfscan SP7 Inspection

L3-BAY1

—

Planned

CVD/ALD(5)

FAB4

Construction

CVD/ALD

CVD Chamber

CVD-3-001

PROD-SE-6631

AMAT Producer SE PECVD

L3-BAY2

—

Active

FAB4

Construction

CVD/ALD

RF Generator

CVD-3-001A

—

AE Paramount RF Generator

L3-BAY2

CVD-3-001

Active

FAB4

Construction

CVD/ALD

ALD Chamber

CVD-3-002

CENT-SPR-4418

AMAT Centura Sprint ALD

L3-BAY2

—

Active

FAB4

Construction

CVD/ALD

CVD Chamber

CVD-3-003

—

Lam VECTOR PECVD System

L3-BAY2

—

Planned

FAB4

Construction

CVD/ALD

Abatement

CVD-B1-001

—

CS Clean Dry Scrubber CVD Abatement

L1-SUB-BAY2

—

Active

Etch(6)

FAB4

Construction

Etch

Conductor Etch

ETCH-3-001

KIYO-FX-3341

Lam Kiyo FX Conductor Etch

L3-BAY4

—

Active

FAB4

Construction

Etch

Turbo Pump

ETCH-3-001A

—

Pfeiffer HiPace 2300 Turbo

L1-SUB-BAY4

ETCH-3-001

Active

FAB4

Construction

Etch

Dielectric Etch

ETCH-3-002

FLEX-DE-2218

Lam Flex Dielectric Etch

L3-BAY4

—

Active

FAB4

Construction

Etch

Etch System

ETCH-3-003

TACT-V-8801

TEL Tactras Vesta Etch

L3-BAY4

—

Active

FAB4

Construction

Etch

Strip/Ash

ETCH-3-004

—

Mattson Suprema Etch/Ash System

L3-BAY4

—

Planned

FAB4

Construction

Etch

Wet Etch

ETCH-3-005

—

SEMES ZEUS Wet Etch/Clean

L3-BAY4

—

Active

Ion Implant(4)

FAB4

Construction

Ion Implant

High Current

IMP-3-001

PUR-HC-5501

Axcelis Purion H HC Implanter

L3-BAY5

—

Active

FAB4

Construction

Ion Implant

End Station

IMP-3-001A

—

Purion H End Station Assembly

L3-BAY5

IMP-3-001

Active

FAB4

Construction

Ion Implant

High Energy

IMP-3-002

PUR-XE-5502

Axcelis Purion XE HE Implanter

L3-BAY5

—

Active

FAB4

Construction

Ion Implant

Medium Current

IMP-3-003

—

Axcelis Purion M Medium Current

L3-BAY5

—

Planned

Diffusion/Thermal(3)

FAB4

Construction

Diffusion/Thermal

Vertical Furnace

DIFF-3-001

VERT-V-9901

Kokusai Vertron V Furnace

L3-BAY6

—

Active

FAB4

Construction

Diffusion/Thermal

RTP

DIFF-3-002

—

AMAT Vantage Vulcan RTP

L3-BAY6

—

Active

FAB4

Construction

Diffusion/Thermal

Anneal

DIFF-3-003

—

Mattson Helios XP Spike Anneal

L3-BAY6

—

Planned

CUB Utilities(16)

FAB4

Construction

CUB Utilities

Chiller

UTL-1-001

RTAE400-SN2201

Trane RTAE 400 Centrifugal Chiller

CUB-MZ

—

Active

FAB4

Construction

CUB Utilities

VFD

UTL-1-001A

—

ABB ACS880 VFD – Chiller #1

CUB-MZ

UTL-1-001

Active

FAB4

Construction

CUB Utilities

Chiller

UTL-1-002

RTAE250-SN2202

Trane RTAE 250 Centrifugal Chiller

CUB-MZ

—

Active

FAB4

Construction

CUB Utilities

Pump Skid

UTL-1-003

CR95-PKG-001

Grundfos CR 95 PCW Pump Skid

CUB-MZ

—

Active

FAB4

Construction

CUB Utilities

Motor

UTL-1-003A

—

WEG W22 75HP Motor – PCW Pump

CUB-MZ

UTL-1-003

Active

FAB4

Construction

CUB Utilities

UPW System

UTL-1-004

UCLEAR-FAB4-01

Evoqua Ultra Clear UPW System

CUB-MZ

—

Active

FAB4

Construction

CUB Utilities

Exhaust Scrubber

UTL-B1-001

—

Edwards Zenith Exhaust Abatement

SUB-FL

—

Active

FAB4

Construction

CUB Utilities

Gas Panel

UTL-Y-001

—

Linde BOGS Bulk Gas Distribution

GAS-YD

—

Active

TOTALS

Mec

Str

Electrical(20)

Pro

Com

Gas

Nat

RO/

Was

Ins

Int

Schedule & Procurement(5)

POC Tag

Description

Area Class

Voltage

Phase

Panel/Direct

Freq (Hz)

Conn Load (kW)

Oper Load (kW)

FLA

MCA

MOCP

Start Method

VFD

NEMA

Conn Type

Cable Size

Prot Device

Prot Rating

UPS

Schedule Link

Submittal

PO Status

Delivery Date

Install Date

EP-LIT-001

EUV Scanner Main Power

Unclass

4160V

Direct

1400

1050

218

272

300

Soft Start

Hard-wired

4/0 AWG

MCCB

300A

A3010 – Install EUV Litho

In Review

Awarded

2026-09-15

2026-11-01

EP-LIT-001A

—

480V

—

350

280

480

—

VFD

—

A3011 – Install EUV Source

Approved

Awarded

—

EP-LIT-001B

—

208V

—

A3012 – Install Reticle Handler

Approved

Awarded

—

EP-LIT-001C

—

480V

—

119

—

A3013 – Install EUV Vacuum

Pending

Awarded

—

EP-LIT-002

—

480V

—

180

140

252

—

A3020 – Install DUV Scanner

Approved

Awarded

2026-07-01

2026-08-15

EP-LIT-003

—

480V

—

133

—

A3030 – Install Coater/Dev

Approved

Awarded

2026-07-15

2026-09-01

EP-CMP-001

—

480V

—

120

150

175

VFD

—

Hard-wired

—

A1040 – Install CMP #1

Approved

Awarded

2026-05-01

2026-06-15

EP-CMP-001A

—

208V

—

A1041 – Install Slurry Delivery

Approved

Awarded

—

EP-CMP-002

—

480V

—

120

—

A1045 – Install CMP #2

Approved

Awarded

2026-05-15

2026-07-01

EP-CMP-003

—

480V

—

A1050 – Install Post-CMP Clean

In Review

Awarded

—

EP-MET-001

—

208V

—

A1060 – Install Surfscan

Pending

Not Started

—

EP-CVD-001

—

480V

—

120

168

—

A2010 – Install PECVD #1

Approved

Awarded

2026-06-01

2026-07-20

EP-CVD-001A

—

480V

—

A2011 – Install RF Gen

Approved

Awarded

—

EP-CVD-002

—

480V

—

133

—

A2020 – Install ALD Chamber

Pending

2026-08-01

—

EP-CVD-003

—

480V

—

105

—

147

—

A2030 – Install Lam PECVD

Pending

Draft

—

EP-CVD-ABT-001

—

480V

—

A2040 – Install CVD Abatement

Approved

Awarded

—

EP-ETCH-001

—

480V

—

110

154

—

A4010 – Install Conductor Etch

Approved

Awarded

2026-06-15

2026-08-01

EP-ETCH-001A

—

208V

—

A4011 – Install Turbo Pump

Approved

Awarded

—

EP-ETCH-002

—

480V

—

105

—

147

—

A4020 – Install Dielectric Etch

Pending

Draft

2026-09-01

—

EP-ETCH-003

—

480V

—

133

—

A4030 – Install TEL Etch

Overdue

Pending

—

EP-ETCH-004

—

480V

—

A4040 – Install Strip System

Not Required

Not Started

—

EP-ETCH-005

—

480V

—

A4050 – Install Wet Etch

Pending

Draft

—

EP-IMP-001

—

480V

—

200

155

280

—

A5010 – Install HC Implanter

Approved

Awarded

2026-07-15

2026-09-01

EP-IMP-001A

—

208V

—

A5011 – Install End Station

Approved

Awarded

—

EP-IMP-002

—

480V

—

250

190

350

—

A5020 – Install HE Implanter

In Review

Awarded

2026-08-01

—

EP-IMP-003

—

480V

—

150

—

210

—

A5030 – Install MC Implanter

Not Required

Not Started

—

EP-DIFF-001

—

480V

—

A6010 – Install Vertical Furnace

Approved

Awarded

2026-05-15

2026-07-01

EP-DIFF-002

—

480V

—

105

—

A6020 – Install RTP System

Pending

Not Started

—

EP-DIFF-003

—

480V

—

A6030 – Install Spike Anneal

Pending

Not Started

—

EP-UTL-001

—

4160V

—

350

280

—

VFD

—

Hard-wired

1/0 AWG

—

A8010 – Install Chiller #1

Approved

Awarded

2026-04-01

2026-05-15

EP-UTL-001A

—

4160V

—

A8011 – Install Chiller VFD

Approved

Awarded

—

EP-UTL-002

—

4160V

—

220

—

VFD

—

A8020 – Install Chiller #2

Approved

Awarded

2026-04-15

—

EP-UTL-003

—

480V

—

105

—

VFD

—

A8030 – Install PCW Pumps

In Review

Pending

—

EP-UTL-003A

—

480V

—

A8031 – Install PCW Motor

Approved

Awarded

—

EP-UTL-004

—

480V

—

A8040 – Install UPW System

Pending

Draft

—

EP-UTL-005

—

480V

—

A8050 – Install Exhaust Scrubbers

Overdue

Pending

—

EP-UTL-006

—

480V

—

A8060 – Install Bulk Gas Panel

Approved

Awarded

2026-03-15

2026-05-01

5,826

3,065

5,581

Master Equipment Matrix

Streamline AI

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